2014 Forester Misfire

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At a bit of a dead end. Looking for suggestions before taking a trip down to the dealer.

6 weeks ago did general maintenance. Oil, air filter, spark plugs, CVT fluid change, diff fluid. Just about to hit 100k.
Noticed a very intermittent but noticeable misfire that would never throw a code. It got worse so I swapped plugs again.
Now its much worse. Very rough idle and very consistent misfire. Now giving codes. All connections tight, plugs fully torqued.
Put new coils in. No change. Still very rough. P0102 (MAF low input), P1494 (EGR solenoid valve low input), P0113 (Intake air temp sensor high input), P0303 Cylinder 3 misfire.
New MAF, no change. MAF sensor plug has 12v, cylinder #3 coil plug also getting 12v. No vacuum issues that I can observe. No physical wire damage that I can observe. No grounds...

I find it hard to believe its anything other than the plugs, coils, or wires since those were what I touched immediately before this started...

Any thoughts or suggestions as to what to check next?
 

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